TOPIC | 5.0 | CMP.A1 EE/PE PASSDOWNS |
| 5.261 | Thu Oct 03 1996 11:23 | follow up | 4 lines |
| 5.293 | Thu Dec 05 1996 00:34 | wafer crash | 5 lines |
| 5.335 | Fri Jan 31 1997 07:06 | Carrier sticking to pad | 7 lines |
| 5.351 | Fri Mar 07 1997 02:18 | A dark and stormy night | 13 lines |
| 5.355 | Thu Mar 20 1997 01:33 | Dropped right carrier | 7 lines |
| 5.367 | Wed Apr 16 1997 03:15 | Carrier drop | 16 lines |
| 5.371 | Sat Apr 19 1997 00:28 | dropping right carrier again | 16 lines |
TOPIC | 7.0 | CMP.A2 EE/PE PASSDOWNS |
| 7.250 | Thu Oct 17 1996 02:55 | Dropping wafers | 5 lines |
| 7.297 | Sat Dec 28 1996 00:10 | pad change | 4 lines |
| 7.301 | Sat Jan 18 1997 03:02 | pad change | 4 lines |
TOPIC | 8.0 | CMP.A2 PM CHECKSHEETS |
| 8.59 | Thu Sep 26 1996 02:21 | WW13 WEEKLY PM COMPLETED | 81 lines |
| 8.69 | Fri Dec 06 1996 02:44 | SEMI-ANNUAL PM COMPLETED FOR WW23 | 195 lines |
TOPIC | 17.0 | CMP.B1 EE/PE PASSDOWNS |
| 17.341 | Sat Aug 24 1996 11:05 | Continuation on carrier #1 | 27 lines |
| 17.354 | Sat Sep 07 1996 11:05 | Robot problems | 3 lines |
| 17.362 | Fri Sep 13 1996 11:59 | End of shift crash | 10 lines |
| 17.365 | Sat Sep 14 1996 09:46 | Carrier #2 crash again | 18 lines |
| 17.371 | Wed Sep 18 1996 10:14 | Loud vibrations | 13 lines |
| 17.391 | Wed Oct 02 1996 02:56 | <finish up on carriewr stalls | 10 lines |
| 17.411 | Wed Oct 16 1996 00:58 | Wrap up after crash | 6 lines |
| 17.414 | Thu Oct 17 1996 03:03 | Wrap up for the day | 5 lines |
| 17.511 | Thu Jan 23 1997 00:25 | Elevator crash | 7 lines |
| 17.515 | Fri Jan 31 1997 01:36 | Load station problems | 15 lines |
| 17.552 | Sat Apr 19 1997 10:15 | Decon continues | 9 lines |
TOPIC | 18.0 | CMP.B1 PM CHECKSHEETS |
| 18.65 | Sat Nov 02 1996 00:26 | WW18 Monthly PM complete | 165 lines |
| 18.87 | Wed Mar 19 1997 09:53 | << WW38 Weekly PM >> | 107 lines |
| 18.91 | Thu Apr 17 1997 02:48 | WW 42 weekly PM complete | 103 lines |
TOPIC | 19.0 | CMP.B2 EE/PE PASSDOWNS |
| 19.222 | Fri Aug 23 1996 10:02 | Carrier #5 Vacuum problems | 35 lines |
| 19.225 | Thu Aug 29 1996 10:35 | broken wafer on unload flip | 22 lines |
| 19.226 | Thu Aug 29 1996 10:38 | carrier replacement | 1 lines |
| 19.244 | Sat Oct 05 1996 10:14 | COMPLETED PAD CHANGE & PM ITEMS | 20 lines |
| 19.274 | Wed Nov 27 1996 10:33 | unoformity problem | 3 lines |
| 19.315 | Fri Feb 28 1997 09:10 | slurry alarm | 13 lines |
| 19.337 | Sat Apr 19 1997 10:22 | Slurry delivery problem | 18 lines |
TOPIC | 20.0 | CMP.B2 PM CHECKSHEETS |
| 20.64 | Wed Nov 27 1996 01:53 | weekly pm complete | 87 lines |
| 20.87 | Thu Apr 24 1997 17:16 | WW43 weekly pm complete | 104 lines |
TOPIC | 21.0 | CMP.B3 EE/PE PASSDOWNS |
| 21.78 | Thu Sep 19 1996 10:58 | Problem during PM | 6 lines |
| 21.121 | Sat Nov 23 1996 00:13 | Particle Control efforts | 10 lines |
| 21.151 | Sat Jan 18 1997 05:20 | More carrier rinse problems | 7 lines |
| 21.154 | Fri Jan 24 1997 02:54 | Wafer not present errors | 16 lines |
TOPIC | 22.0 | CMP.B3 PM CHECKSHEETS |
| 22.31 | Wed Dec 11 1996 07:44 | Monthly PM complete | 172 lines |
TOPIC | 23.0 | CMP.B4 EE/PE PASSDOWNS |
| 23.27 | Sat Feb 08 1997 06:59 | Moisture sensor again | 18 lines |
TOPIC | 32.0 | CMP.B WAFER CRASH FORM |
| 32.15 | Sat Nov 02 1996 08:41 | Fly out problems | 10 lines |
TOPIC | 46.0 | CMP-SCRUB.A1 PM CHECKSHEETS |
| 46.79 | Thu Feb 13 1997 08:57 | WW #33 Weekly PM | 34 lines |
| 46.89 | Wed Apr 23 1997 17:52 | WW 43 weekly PM complete | 31 lines |
TOPIC | 47.0 | CMP-SCRUB.A2 EE/PE PASSDOWNS |
| 47.153 | Sun Apr 27 1997 23:02 | Leaking shafts | 12 lines |
| 47.154 | Mon Apr 28 1997 23:24 | Completion of shaft replacements | 10 lines |
| 47.156 | Sun May 11 1997 14:39 | Lifter bearings | 10 lines |
TOPIC | 48.0 | CMP-SCRUB.A2 PM CHECKSHEETS |
| 48.73 | Thu Jan 16 1997 00:20 | Weekly PM complete for WW29 | 32 lines |
| 48.88 | Sun Apr 27 1997 16:33 | WW44 weekly pm completed | 45 lines |
TOPIC | 49.0 | CMP-SCRUB.A3 EE/PE PASSDOWNS |
| 49.15 | Thu Sep 05 1996 03:33 | Bad roller | 8 lines |
| 49.16 | Thu Sep 05 1996 10:02 | sensor tyimeout problems | 7 lines |
| 49.18 | Fri Sep 06 1996 06:50 | Dropping wafer problem | 12 lines |
| 49.20 | Sat Sep 07 1996 09:27 | dropping wafers & erratic sensors | 18 lines |
| 49.25 | Sat Sep 28 1996 03:20 | Lost wafer syndrome | 5 lines |
| 49.33 | Sat Oct 05 1996 04:08 | replce roller arm | 4 lines |
| 49.52 | Thu Mar 06 1997 06:21 | Leaks, jams and dropsies | 20 lines |
| 49.53 | Thu Mar 06 1997 09:11 | A dull thud, then nothing.... | 9 lines |
TOPIC | 50.0 | CMP-SCRUB.A3 PM CHECKSHEETS |
| 50.13 | Thu Sep 19 1996 03:48 | Scrub .A3 Weekly PM complete | 29 lines |
| 50.31 | Thu Jan 16 1997 00:22 | Weekly PM complete for WW29 | 32 lines |
| 50.35 | Thu Feb 13 1997 09:01 | WW #33 weekly PM | 39 lines |
TOPIC | 55.0 | CMP-SCRUB.C1 PM CHECKSHEETS |
| 55.10 | Thu Oct 10 1996 08:23 | Weekly Pm WW#15 complete | 28 lines |
| 55.20 | Thu Dec 19 1996 01:20 | cmp-scrub.c7 weekly PM | 33 lines |
TOPIC | 61.0 | GENERAL CMP ISSUES |
| 61.52 | Sat Sep 14 1996 11:44 | DI glitch | 6 lines |
TOPIC | 77.0 | IN-COMPLETE PMs |
| 77.1 | Fri Feb 28 1997 10:41 | WEEKLY PM STARTED | 102 lines |
| 77.4 | Fri Mar 07 1997 10:27 | Began Mo. PM | 170 lines |