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Posting history for user FABSIX::R_GEE

332 notes across 2 conferences

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Posts		Conference Title
asdg::cmp331CMP
7.286::classified_ads1Welcome to C_A, Please READ THE RULES in Note 2.*

Conference 7.286::classified_ads (Welcome to C_A, Please READ THE RULES in Note 2.*)

1 posts
TOPIC6239.0Tue Nov 05 1996 12:21 Free skidoo & 55 gal. barrels / 300 gal. fuel tank 19 lines

Conference asdg::cmp (CMP)

331 posts
TOPIC 2.0 PAD CHANGE DATA
2.10Tue Nov 14 1995 04:55 CMP.B1 3 lines
2.21Sun Nov 19 1995 06:18 cmp.a1 1 lines
2.22Sun Nov 19 1995 06:20 cmp.a2 1 lines
2.25Tue Nov 21 1995 02:23 cmp.a2 6 lines
2.30Mon Nov 27 1995 09:46 cmp.a1 6 lines
2.32Tue Nov 28 1995 00:38 CMP.B1 2 lines
2.42Mon Dec 04 1995 00:25 CMP.A1 6 lines
2.43Mon Dec 04 1995 05:40 CMP.A2 6 lines
2.44Mon Dec 04 1995 10:13 CMP.B1 3 lines
2.49Sun Dec 10 1995 00:07 cmp.a1 7 lines
2.50Sun Dec 10 1995 00:43 cmp.b1 3 lines
2.75Tue Jan 02 1996 02:51 cmp.a1 6 lines
2.76Tue Jan 02 1996 02:55 cmp.a2 6 lines
2.77Tue Jan 02 1996 02:57 cmp.b2 3 lines
2.78Tue Jan 02 1996 03:01 cmp.b1 3 lines
2.79Tue Jan 02 1996 10:52 cmp.a2 7 lines
2.80Tue Jan 02 1996 10:54 cmp.b1 2 lines
2.81Tue Jan 02 1996 10:54 cmp.b2 1 lines
2.115Wed Jan 17 1996 09:58 CMP.A2 6 lines
2.136Sat Jan 27 1996 23:51 CMP.A2 6 lines
2.137Sun Jan 28 1996 03:43 CMP.A2 11 lines
2.140Mon Jan 29 1996 06:06 cmp.b2 3 lines
2.145Mon Feb 05 1996 06:27 cmp.b1 8 lines
2.151Sun Feb 11 1996 10:07 cmp.a2 10 lines
2.152Tue Feb 13 1996 00:35 cmp.a2 10 lines
2.159Sun Feb 18 1996 01:39 cmp.b2 10 lines
2.162Mon Feb 19 1996 01:21 cmp.b2 10 lines
2.167Tue Feb 20 1996 10:12 cmp.b1 10 lines
TOPIC 3.0 CONDITIONER CHANGE DATA
3.2Sun Nov 19 1995 06:21 cmp.a2 2 lines
3.4Mon Dec 04 1995 05:48 cmp.a1 1 lines
3.5Mon Dec 04 1995 05:49 cmp.a2 1 lines
3.6Sun Dec 10 1995 00:13 cmp.a1 3 lines
3.13Wed Jan 17 1996 09:54 cmp.b2 1 lines
3.15Sun Jan 28 1996 03:44 CMP.A2 1 lines
3.17Tue Feb 13 1996 00:37 cmp.a2 1 lines
TOPIC 5.0 CMP.A1 EE/PE PASSDOWNS
5.96Wed Nov 08 1995 10:02 High Table amps, wafers slidding out 30 lines
5.103Sun Nov 12 1995 10:02 Robot vacuum 14 lines
5.109Sun Nov 19 1995 10:13 Broke wafers 11 lines
5.113Mon Nov 27 1995 10:08 Broken wafer 14 lines
5.116Mon Dec 11 1995 09:50 Robot vacuum line 7 lines
5.121Tue Jan 02 1996 10:44 vacuum problems / rotory union 31 lines
5.143Tue Jan 30 1996 10:12 left spindle pressure transducer / Robot 32 lines
5.145Wed Jan 31 1996 09:00 Robot to elevator alignment / wafer present 37 lines
5.157Mon Feb 26 1996 09:43 Cut down a speedfam pad 20 lines
5.166Mon Mar 11 1996 06:30 robot end effector 6 lines
5.177Sun Mar 17 1996 09:49 Robot alignments / Right send elevator 15 lines
5.195Mon Apr 22 1996 11:08 robot vacuum 5 lines
5.198Tue Apr 30 1996 15:14 Right spindle downforce problems 14 lines
5.201Mon May 06 1996 11:10 Right load cup 10 lines
5.210Sun Jun 02 1996 10:53 broken wafer 8 lines
5.211Mon Jun 03 1996 11:16 High particles and scratches 16 lines
5.215Tue Jun 11 1996 10:50 Wafer slid out 9 lines
5.216Mon Jun 17 1996 11:14 filters 4 lines
5.227Mon Jul 15 1996 11:08 High particles and scratches 10 lines
5.229Tue Jul 16 1996 11:20 Left spindle water leak 10 lines
5.237Mon Aug 12 1996 11:27 Left spindle 7 lines
5.238Tue Aug 13 1996 11:16 Robot 7 lines
5.239Tue Aug 27 1996 10:53 Carriers sticking to pad 7 lines
5.259Tue Oct 01 1996 23:42 Right carrier problem 6 lines
5.266Mon Oct 07 1996 23:36 Spindle Downforce Cal. 9 lines
5.314Mon Dec 23 1996 21:50 Right carrier / Robot 14 lines
5.320Mon Dec 30 1996 22:41 Computer / Robot top arm 8 lines
5.326Mon Jan 06 1997 19:47 Front monitor is working again 5 lines
5.343Mon Feb 17 1997 22:33 Left spindle rotary joint 8 lines
TOPIC 6.0 CMP.A1 PM CHECKSHEETS
6.8Tue Dec 05 1995 02:52 WEEKLY P.M. 78 lines
6.9Sun Dec 10 1995 04:54 weekly p.m. 78 lines
6.22Mon Feb 26 1996 01:02 ww35 weekly p.m. 72 lines
6.23Sun Mar 03 1996 03:03 ww36 weekly p.m. 71 lines
6.24Tue Mar 12 1996 00:33 weekly p.m. 71 lines
6.27Tue Apr 02 1996 06:14 ww40 Weekly p.m. 71 lines
6.51Mon Aug 12 1996 09:30 ww07 monthly p.m. 156 lines
6.61Tue Oct 08 1996 23:09 ww15 weekly p.m. completed 73 lines
6.73Tue Dec 31 1996 18:27 CMP.A1 shutdown checksheet completed. 40 lines
6.78Sun Jan 26 1997 18:29 ww 31 weekly p.m. completed 75 lines
6.84Sun Mar 09 1997 22:25 ww37 weekly p.m. completed 75 lines
TOPIC 7.0 CMP.A2 EE/PE PASSDOWNS
7.87Wed Nov 08 1995 10:03 High Table Amps / wafer fly outs 27 lines
7.95Sun Nov 19 1995 10:14 broke wafers / replaced carrier plates 23 lines
7.96Sun Nov 19 1995 10:15 High particles / brush change 19 lines
7.97Tue Nov 21 1995 10:17 DI Water leak 14 lines
7.106Mon Dec 11 1995 09:51 Robot vacuum line 6 lines
7.107Tue Dec 12 1995 10:02 broken wafer 14 lines
7.114Tue Jan 02 1996 10:46 slurry line / broken wafers 13 lines
7.118Wed Jan 17 1996 10:04 Bridge not arriving at polish 11 lines
7.121Tue Jan 23 1996 09:57 Slurry #1 line leak. 7 lines
7.124Sun Jan 28 1996 11:19 bubbles between the pads/ broke wafer 12 lines
7.133Sun Feb 11 1996 10:02 Scratches 12 lines
7.141Wed Feb 28 1996 10:27 Conditioner arm up sensor bracket 14 lines
7.148Mon Mar 11 1996 06:31 Robot End Effector 12 lines
7.149Wed Mar 13 1996 05:31 robot to left send station position 12 lines
7.169Wed Apr 10 1996 11:10 Left spindle air leak 11 lines
7.171Tue Apr 16 1996 11:45 broken wafer / poor uniformity / poor range 16 lines
7.174Sun Apr 28 1996 10:51 Broken wafer 10 lines
7.178Sun May 05 1996 11:15 Broken wafer 9 lines
7.179Mon May 06 1996 11:13 Broken wafer 12 lines
7.184Sun May 19 1996 11:09 Carrier problem 9 lines
7.191Mon Jun 03 1996 11:16 Robot vacuum problem 10 lines
7.195Sun Jun 09 1996 11:06 head to head removal / carrier problem 11 lines
7.197Tue Jun 18 1996 11:28 Robot 6 lines
7.205Wed Jul 17 1996 11:04 Failed MQC's 17 lines
7.208Mon Jul 22 1996 11:20 Wafers sticking 9 lines
7.212Mon Aug 19 1996 10:57 broken wafer 13 lines
7.218Tue Sep 10 1996 11:40 Carrier sticking to the table 2 lines
7.291Sun Dec 15 1996 22:37 Broken wafer, carrier problem 13 lines
7.343Tue Mar 11 1997 22:28 robot 8 lines
TOPIC 8.0 CMP.A2 PM CHECKSHEETS
8.22Mon Mar 11 1996 02:17 weekly p.m. completed 72 lines
8.41Mon Jun 17 1996 08:31 weekly p.m. completed 72 lines
8.42Tue Jun 25 1996 10:40 Weekly p.m. completed 71 lines
8.43Tue Jul 02 1996 03:07 weekly p.m. 71 lines
8.47Wed Jul 17 1996 05:19 weekly p.m. completed 236 lines
8.49Mon Jul 29 1996 01:56 ww05 weekly p.m. 71 lines
8.61Tue Oct 08 1996 16:40 Monthly p.m. completed 166 lines
8.71Sun Dec 15 1996 20:50 WW 25 - Weekly completed 76 lines
8.74Tue Dec 31 1996 18:28 CMP.A2 shutdown checksheet completed 40 lines
8.79Sun Jan 26 1997 18:48 ww 31 weekly p.m. completed 75 lines
8.94Tue May 13 1997 21:45 ww46 weekly p.m. completed 77 lines
8.98Sun Jun 01 1997 18:38 ww49 Annual p.m. completed 213 lines
TOPIC 9.0 STRASBAUGH CRASH FORMS
9.36Sun Dec 15 1996 21:16 CMP.B2 breakin wafer broke 67 lines
TOPIC 17.0 CMP.B1 EE/PE PASSDOWNS
17.87Sun Nov 12 1995 10:04 Vibration after polish 5 lines
17.89Tue Nov 14 1995 08:59 Severe Vibration at polish / High Particles 40 lines
17.96Mon Nov 20 1995 10:00 Cleaned-up wafer particles. 10 lines
17.99Wed Nov 22 1995 08:08 Elevator water level / Touch screen lockup 13 lines
17.109Sun Dec 03 1995 09:54 Vacuum Errors / load Errors / Wafer Fly-out 36 lines
17.110Sun Dec 03 1995 09:55 Vacuum Problems 36 lines
17.112Mon Dec 04 1995 10:28 Bridge failure / broken wafer 19 lines
17.120Mon Dec 11 1995 09:52 Slurry pump lines 5 lines
17.127Mon Dec 18 1995 10:07 Vacuum tank poppet valve / index table gearbox leak 13 lines
17.129Wed Dec 20 1995 07:00 Main Vacuum to low. 9 lines
17.157Tue Jan 16 1996 10:04 Spindle removal 16 lines
17.159Wed Jan 17 1996 10:07 Spindle work 59 lines
17.166Sun Jan 21 1996 10:07 Carrier #1 stops rotating during polish 16 lines
17.168Mon Jan 22 1996 09:56 Carrier Arms not oscillating 12 lines
17.184Tue Feb 06 1996 09:25 System powered down / Carrier rotation 15 lines
17.198Sun Feb 18 1996 09:47 Head #1 not rotating 10 lines
17.199Mon Feb 19 1996 05:03 Slurry filter changed 4 lines
17.218Mon Mar 11 1996 10:03 Mapper / Field Rep. beeper # 14 lines
17.220Tue Mar 12 1996 10:39 Mapper 13 lines
17.221Wed Mar 13 1996 09:54 Mapper again 11 lines
17.238Sun Mar 31 1996 11:18 slurry problem 12 lines
17.240Wed Apr 10 1996 11:12 Multihead Travel 2 lines
17.248Sun Apr 28 1996 10:52 Broken Wafer 12 lines
17.254Sun May 26 1996 10:45 Carrier #1 not rotating 15 lines
17.262Sun Jun 02 1996 10:51 Carrier #1 rotation error 11 lines
17.265Tue Jun 04 1996 11:40 Carrier #1 rotation 7 lines
17.270Tue Jun 11 1996 10:51 Wafer track #1 8 lines
17.271Tue Jun 11 1996 10:51 Process doors 10 lines
17.275Tue Jun 18 1996 11:27 Lost a wafer at liftoff 9 lines
17.283Wed Jul 03 1996 11:29 Fly-out from head #5 10 lines
17.287Sun Jul 07 1996 11:06 Carrier #1 not rotating 14 lines
17.288Tue Jul 09 1996 09:33 Index table out of adjustment / air cylinders 16 lines
17.296Mon Jul 15 1996 11:10 High particles and scratches / conditioner tub 15 lines
17.300Tue Jul 30 1996 10:50 DCX.CMP corrupted 12 lines
17.312Mon Aug 12 1996 11:25 Robot 8 lines
17.313Tue Aug 13 1996 11:18 Load flipper / unload cup / broken wafer 21 lines
17.330Sun Aug 18 1996 10:17 Broken oxide monitor from head #5 10 lines
17.332Tue Aug 20 1996 11:26 Broken wafer 9 lines
17.344Sun Aug 25 1996 10:39 Carrier #1 rotation Adjusted Infranor voltage 16 lines
17.345Tue Aug 27 1996 10:52 all carriers not rotating 19 lines
17.346Wed Aug 28 1996 11:00 Head rotation errors / head to index table alignment 36 lines
17.369Mon Sep 16 1996 23:35 rotation problems, Infranor adjustments 7 lines
17.370Tue Sep 17 1996 23:41 Vacuum transducers / slurry soleniod / broken wafer 14 lines
17.400Sun Oct 06 1996 23:42 Poor uniformity & removal rate / downforce 13 lines
17.477Wed Dec 04 1996 22:05 Wafer detect sensors adjusted 7 lines
17.502Mon Jan 06 1997 21:43 Conditioner recipe #1 ID/OD changed 6 lines
17.520Mon Feb 17 1997 22:33 low slurry flow 8 lines
17.534Mon Mar 24 1997 17:11 Carrier #2 rotation infanor 7 lines
TOPIC 18.0 CMP.B1 PM CHECKSHEETS
18.74Tue Dec 31 1996 18:39 CMP.B1 shutdown checksheet completed 28 lines
18.78Mon Jan 13 1997 11:17 ww 29 weekly p.m. completed 86 lines
TOPIC 19.0 CMP.B2 EE/PE PASSDOWNS
19.9Sun Nov 12 1995 10:06 Marathon run started 24 lines
19.10Mon Nov 13 1995 10:17 Mechanical acceptance completed 11 lines
19.26Mon Dec 11 1995 09:53 Index table alignments 20 lines
19.28Tue Dec 12 1995 09:51 Load / Unload cups 19 lines
19.31Mon Dec 18 1995 10:07 Released to manufacturing 4 lines
19.56Wed Jan 17 1996 10:08 Carrier #3 rotation failure / #5 uniformity 24 lines
19.63Sun Jan 21 1996 10:06 Carrier #5 not rotating 16 lines
19.69Sun Jan 28 1996 11:20 Alignments / load flipper / rotation stopped 25 lines
19.71Tue Jan 30 1996 10:14 Carrier #2 fly out 9 lines
19.85Mon Feb 05 1996 10:07 scrub station 9 lines
19.94Mon Feb 12 1996 10:16 Slurry flow stopped 19 lines
19.103Sun Feb 18 1996 09:48 Secondary table by-passed / Left wafer on pad 18 lines
19.105Mon Feb 19 1996 10:03 Load flipper alignment / unload cup #1 problem 27 lines
19.107Tue Feb 20 1996 10:15 Head %3 off line / #1 & #5 unload 23 lines
19.116Mon Feb 26 1996 09:41 water leak / scrub station up/down travel 20 lines
19.117Tue Feb 27 1996 10:02 Scrub station / load flipper / broken wafer 30 lines
19.121Sun Mar 10 1996 09:46 Load flipper 5 lines
19.126Sun Mar 17 1996 09:15 unload flipper 7 lines
19.135Tue Apr 02 1996 10:48 Robot to cassette #1 alignment 8 lines
19.140Sun Apr 07 1996 11:10 Vacuum problem / DI water leak 31 lines
19.144Sun Apr 14 1996 10:50 Index table air cylinders 7 lines
19.145Mon Apr 15 1996 11:34 secondary pad replaced / scrub station 16 lines
19.149Sun Apr 21 1996 10:49 Unload flipper 13 lines
19.157Sun May 05 1996 09:47 AB Boxes 5 lines
19.168Tue May 21 1996 11:09 system pausing during polish 9 lines
19.170Sun May 26 1996 10:47 Bootup problems / A/B box 13 lines
19.174Sun Jun 02 1996 10:52 Index table crash 13 lines
19.183Mon Jun 10 1996 11:05 system locked up 9 lines
19.198Tue Jun 25 1996 12:29 Broken wafer 16 lines
19.204Tue Jul 09 1996 09:11 Conditioner down force 8 lines
19.209Tue Jul 30 1996 10:51 particles passed 10 lines
19.215Mon Aug 12 1996 11:25 High particles 12 lines
19.216Tue Aug 13 1996 11:22 Broken wafer / vibration 20 lines
19.219Tue Aug 20 1996 11:26 vacuum pump relocated 7 lines
19.231Tue Sep 10 1996 11:38 Broken wafer 21 lines
19.248Sun Oct 06 1996 23:43 Wafer detect tripped 11 lines
19.258Sun Nov 03 1996 22:26 all carriers not down 14 lines
19.312Mon Feb 17 1997 22:34 low slurry flow 8 lines
TOPIC 20.0 CMP.B2 PM CHECKSHEETS
20.12Mon Feb 05 1996 05:58 ww32 weekly p.m. 61 lines
20.48Sun Aug 18 1996 02:45 Monthly p.m. completed 150 lines
20.70Tue Dec 31 1996 18:40 CMP.B2 shutdown checksheet completed 28 lines
20.91Sun May 18 1997 13:23 ww47 weekly p.m. completed / pads changed 103 lines
TOPIC 21.0 CMP.B3 EE/PE PASSDOWNS
21.3Mon May 06 1996 11:14 Slurry leak 5 lines
21.6Wed May 08 1996 10:37 pads replaces 4 lines
21.24Tue Jun 18 1996 11:10 carrier at polish reed switches 21 lines
21.29Mon Jun 24 1996 11:36 high particles and uniformity 11 lines
21.41Sun Jul 21 1996 11:09 water leak 7 lines
21.44Tue Jul 23 1996 10:50 Table spray nossle / replaced carrier #5 10 lines
21.48Tue Jul 30 1996 10:52 Mapper error 5 lines
21.58Tue Aug 13 1996 11:21 Door rollers 11 lines
21.62Mon Aug 19 1996 11:34 Vacuum pump moved 7 lines
21.72Tue Sep 10 1996 11:39 Mapper Error 5 lines
21.73Wed Sep 11 1996 11:28 Robot to cassette adjustment 7 lines
21.98Tue Oct 22 1996 23:03 Down force cal. 12 lines
21.103Wed Oct 23 1996 23:33 Slurry & DI clean lines 16 lines
21.124Mon Nov 25 1996 22:08 Pump #3 5 lines
21.125Mon Dec 02 1996 22:03 Polish table Motor and Gearbox replacement update 7 lines
21.126Tue Dec 03 1996 22:33 Polish table motor and gearbox replacement update 8 lines
21.127Wed Dec 04 1996 22:14 Slurry pump #2 problems 8 lines
21.130Tue Dec 10 1996 22:02 Wafer left on pad at lift-off 6 lines
21.148Tue Jan 07 1997 20:10 conditioner ring change procedure used 18 lines
21.210Tue May 20 1997 23:15 Down force calibrated 15 lines
TOPIC 22.0 CMP.B3 PM CHECKSHEETS
22.3Wed Jun 19 1996 03:36 weekly pm completed 82 lines
22.8Mon Jul 08 1996 08:58 work week #2 weekly p.m. 81 lines
22.10Tue Jul 23 1996 01:43 weekly p.m. 80 lines
22.35Tue Dec 31 1996 18:40 CMP.B3 shutdown checksheet completed 28 lines
22.44Mon Mar 03 1997 22:14 ww 36 weekly p.m. completed 102 lines
TOPIC 23.0 CMP.B4 EE/PE PASSDOWNS
23.33Tue Feb 25 1997 21:46 conditioner 7 lines
23.44Mon Mar 24 1997 11:54 Automation frame di water leak / slurry pump #2 13 lines
23.86Sun May 18 1997 23:18 High particles 6 lines
TOPIC 24.0 CMP.B4 PM CHECKSHEETS
24.8Mon Jun 02 1997 20:02 ww49 weekly p.m. completed 102 lines
TOPIC 34.0 SF SOFTWARE BUG/WISH
34.6Sun Apr 21 1996 11:05 Polished wafers twices. 27 lines
TOPIC 37.0 CMP.C1-7 EE/PE PASSDOWNS
37.399Tue Jan 21 1997 22:08 Conditioner / carrier lift-off position 9 lines
37.415Mon Mar 10 1997 22:26 cassette sensor and more 11 lines
37.418Mon Mar 17 1997 12:28 Slurry tanks / tool functionality 16 lines
37.419Mon Mar 17 1997 22:30 spindles not rotating / vacuum / recieve dump/fill 11 lines
TOPIC 41.0 CMP.D1-7 EE/PE PASSDOWNS
41.4Wed Mar 26 1997 21:58 Vacuum pump / N2 pressure sensor lines 8 lines
41.7Mon Apr 07 1997 13:11 Conditioner 9 lines
41.8Mon Apr 07 1997 13:17 Water in solenoids 5 lines
41.9Mon Apr 07 1997 13:24 GFI module 6 lines
41.10Mon Apr 07 1997 16:44 #3 wafer lose sensor 4 lines
41.13Thu Apr 10 1997 22:09 Polish tub rinse valve 2 lines
41.14Thu Apr 10 1997 23:47 Mechanical acceptances stopped 12 lines
41.19Mon Apr 14 1997 20:36 Primary polish tube rinse / DI leak 7 lines
41.20Tue Apr 15 1997 13:13 pad conditioner rinse station 4 lines
41.21Thu Apr 17 1997 15:43 Mega System for Oxide slurry 5 lines
41.22Thu Apr 17 1997 15:45 Vacuum pump filter 3 lines
41.23Mon Apr 21 1997 21:51 Chiller 8 lines
41.24Mon Apr 21 1997 22:17 Screen locked up 7 lines
41.25Tue Apr 22 1997 22:52 Screen locked up 4 lines
41.26Tue Apr 22 1997 23:30 chiller wouldn't cool to set point 12 lines
41.27Wed Apr 23 1997 23:07 Screen locked up / slurry to barrel lines removed 18 lines
41.29Mon Apr 28 1997 22:36 #2 load cup / Slurry pumps cal'ed 15 lines
41.30Mon Apr 28 1997 22:54 2% Citric to scrub brushes / Robot & DI water 28 lines
41.31Mon Apr 28 1997 22:58 Modified Carriers 3 & 4 Sray nossles 5 lines
41.32Tue Apr 29 1997 21:39 Slurry pumps #4 & 5 cal'ed 8 lines
41.33Tue Apr 29 1997 21:49 Enhanced carrier spray has been modified 11 lines
41.34Wed Apr 30 1997 15:23 Scrubber brushes changed 8 lines
41.35Wed Apr 30 1997 20:16 Tool locked up 10 lines
41.36Wed Apr 30 1997 20:38 Carrier retainer ring screw set-up 14 lines
TOPIC 41.0 CMP.D1 EQUIP PASSDOWNS
41.42Mon May 19 1997 23:09 todays activities 10 lines
41.43Tue May 20 1997 23:13 Wafer lose sencor brackets modified\ 8 lines
41.47Mon Jun 02 1997 22:57 Head #3 downforce checked / wafer detect #1 9 lines
TOPIC 45.0 CMP-SCRUB.A1 EE/PE PASSDOWNS
45.53Mon Nov 13 1995 10:16 Robot Fingers 19 lines
45.58Mon Nov 27 1995 10:04 spin station spindle shaft 17 lines
45.65Tue Dec 19 1995 10:03 Inside Brush Station rollers 16 lines
45.71Tue Jan 02 1996 10:48 Ammonia 3 lines
45.82Mon Mar 11 1996 10:05 Inside brush station top brush motor. 5 lines
45.91Sun Mar 31 1996 11:09 inside brush station / wl_scrub.a1 5 lines
45.95Wed Apr 10 1996 11:07 Spin Station / inside brush station rollers 15 lines
45.98Mon Apr 22 1996 11:09 Inside Brush station 12 lines
45.108Mon May 20 1996 10:37 Inside brush station roller speed 5 lines
45.117Wed Jun 19 1996 07:56 Brush station rollers 9 lines
45.127Sun Jul 21 1996 11:09 spin station carriage 8 lines
45.128Tue Jul 23 1996 10:52 Spin Station up travel 4 lines
45.131Sun Aug 11 1996 10:39 Ammonia leak 5 lines
TOPIC 46.0 CMP-SCRUB.A1 PM CHECKSHEETS
46.6Tue Nov 14 1995 01:07 weekly p.m. 23 lines
46.7Wed Nov 22 1995 05:06 weekly p.m. 24 lines
46.20Mon Feb 12 1996 03:39 ww33 weekly p.m. 24 lines
46.42Tue Jul 02 1996 06:04 weekly p.m. 27 lines
46.61Mon Oct 14 1996 21:03 WW 16 weekly p.m. completed 30 lines
46.66Mon Nov 18 1996 21:51 WW 21 weekly p.m. completed 28 lines
46.72Tue Dec 31 1996 18:56 cmp-scrub.a1 shutdown checksheet completed 23 lines
TOPIC 47.0 CMP-SCRUB.A2 EE/PE PASSDOWNS
47.60Tue Nov 21 1995 10:15 robot fingers adjusted 9 lines
47.67Tue Jan 02 1996 10:49 ammonia 3 lines
47.74Sun Feb 11 1996 09:58 outside brush station lower brush bearings 5 lines
47.89Tue Apr 02 1996 10:47 Inside & outside DI water flow regulators 4 lines
47.104Mon Jun 17 1996 11:15 Megasonics arm home position amplifier 7 lines
47.109Tue Jul 09 1996 09:05 Outside brush station lower brush 3 lines
47.110Sun Jul 21 1996 11:13 OB station exit belt rollers 6 lines
47.118Tue Sep 10 1996 11:38 Receive station door lock 6 lines
TOPIC 48.0 CMP-SCRUB.A2 PM CHECKSHEETS
48.7Tue Dec 05 1995 00:03 weekly p.m. 23 lines
48.38Wed Jun 19 1996 07:53 Weekly p.m. completed 28 lines
48.40Tue Jul 02 1996 05:31 weekly p.m. completed 23 lines
48.59Mon Oct 14 1996 21:23 WW16 weekly p.m. completed 27 lines
48.64Mon Nov 18 1996 21:51 WW 21 weekly p.m. completed 25 lines
48.70Tue Dec 31 1996 19:00 cmp-scrub.a2 shutdown checkseet completed 23 lines
TOPIC 49.0 CMP-SCRUB.A3 EE/PE PASSDOWNS
49.43Sun Dec 15 1996 21:18 OB station roller speed out of spec 8 lines
49.44Mon Dec 16 1996 22:26 OB station motor 8 lines
49.49Mon Feb 24 1997 21:53 Megasonics Arm / Inside brush station rollers 32 lines
49.55Mon Mar 24 1997 17:13 lost wafer at lift 4 lines
49.76Sun May 18 1997 23:19 Dropped wafer 11 lines
TOPIC 50.0 CMP-SCRUB.A3 PM CHECKSHEETS
50.17Mon Oct 14 1996 21:35 WW 16 weekly p.m. completed 27 lines
50.28Tue Dec 31 1996 19:01 cmp-scrub.a3 shutdown checksheet completed 23 lines
50.37Mon Feb 24 1997 21:15 ww35 weekly p.m. completed 42 lines
50.41Mon Mar 24 1997 11:40 ww39 weekly p.m. completed 32 lines
TOPIC 54.0 CMP-SCRUB.C1 EE/PE PASSDOWNS
54.4Tue Oct 15 1996 23:39 OB station roller motor / Send station 8 lines
54.13Tue Apr 08 1997 20:20 brush change 10 lines
TOPIC 55.0 CMP-SCRUB.C1 PM CHECKSHEETS
55.6Wed Sep 11 1996 09:16 WW 11 weekly p.m. 30 lines
55.19Sun Dec 08 1996 16:40 ww24 weekly p.m. completed 26 lines
55.21Sun Dec 22 1996 19:40 ww 26 quarterly p.m. completed 37 lines
55.22Tue Dec 31 1996 19:03 cmp-scrub.c1-7 shutdown checksheet completed 23 lines
55.42Tue May 13 1997 13:24 Weekly pm completed for ww46 29 lines
55.44Tue May 27 1997 17:09 WW48 weekly PM completed 29 lines
55.46Tue Jun 03 1997 22:18 WW49 WEEKLY P.M. COMPLETED 29 lines
TOPIC 61.0 GENERAL CMP ISSUES
61.24Sun Feb 18 1996 08:24 Slurry & Ammonia Shutdown 10 lines
61.26Sun Mar 03 1996 10:44 NO AMMONIA FLOW 3 lines
61.36Tue May 21 1996 08:18 Slurry filter clogged 5 lines
61.40Mon Jun 03 1996 11:18 Room down due to no slurry 5 lines
61.70Tue Dec 10 1996 22:06 Polish Pad storage cabinet moved 6 lines
61.72Sun Dec 22 1996 20:11 Carrier rebuild room megasonic sink pump 6 lines
TOPIC 62.0 Process Excursion (PEX) for CMP
62.78Wed Feb 14 1996 10:12 Scubber up/down travel 26 lines
TOPIC 63.0 EEG CMP DAILY PD
63.139Mon Nov 25 1996 22:06 Updated EEG passdown, change to CMP.B1 37 lines
TOPIC 83.0 Carrier Passdowns
83.130Tue Dec 10 1996 21:57 Strasbaugh Carriers scribed & grouped into sets. 54 lines

Additional information

First Post:Wed Nov 08 1995
Last Post:Tue Jun 03 1997
# Topics:1
# Replies:331
# We have note bodies for:331
Total memory used by this script: 1,034,112 (4,194,304)