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Posting history for user ASDG::POIRIER

279 notes across 3 conferences

Known Personal Names (2)

Summary of Posts

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Posts		Conference Title
asdg::cmp276CMP
7.286::classified_ads2Welcome to C_A, Please READ THE RULES in Note 2.*
7.286::home_work1Home_work

Conference 7.286::home_work (Home_work)

1 posts
TOPIC 33.0 Floor - Hardwood
33.579Wed Apr 06 1994 13:47 Hardwood FLoor Woe's 29 lines

Conference 7.286::classified_ads (Welcome to C_A, Please READ THE RULES in Note 2.*)

2 posts
TOPIC5819.0Wed Oct 16 1996 16:59 RAINSOFT Water Conditioning System 11 lines
5819.1Thu Oct 17 1996 17:17 Price Reduced to $250.00 6 lines

Conference asdg::cmp (CMP)

276 posts
TOPIC 2.0 PAD CHANGE DATA
2.13Wed Nov 15 1995 20:50 CMP.A2 Pad Change 11/15/95 19 lines
2.56Tue Dec 12 1995 22:47 Pad Replaced 12/12/95 7:30 p.m. 13 lines
TOPIC 3.0 CONDITIONER CHANGE DATA
3.10Sat Jan 06 1996 19:45 CMP.A2 CONDITIONER DISK CHANGED 7 lines
3.24Sat Dec 14 1996 14:37 Conditioning Disk & Pad Replaced - Wafer Breakage 20 lines
TOPIC 5.0 CMP.A1 EE/PE PASSDOWNS
5.101Fri Nov 10 1995 22:47 Wafer Fly-out experiment 15 lines
5.108Sat Nov 18 1995 22:25 CMP.A1 Status 11/18/95 12 lines
5.111Fri Nov 24 1995 22:32 Air Motor Replaced 9 lines
5.119Sat Dec 30 1995 18:21 Shuttle Lubed & Adjusted / Right Cleaning Station Air Motor Noisy 11 lines
5.124Fri Jan 05 1996 22:38 Robot "at Left Load" Position Changed. 5 lines
5.125Sat Jan 06 1996 22:33 Robot Pnuematic Sensor. 15 lines
5.148Thu Feb 01 1996 22:27 Robot End Effector Pressure too low 19 lines
5.150Fri Feb 02 1996 22:15 Robot Vacuum Sensor Calibrated 6 lines
5.154Thu Feb 15 1996 22:30 Rotbot Vac Switch in need of adjustment 7 lines
5.159Thu Feb 29 1996 22:38 Robot Pick-up Problems on both Send Stations 27 lines
5.165Sat Mar 09 1996 22:29 Conditioner Head / Right Send Elevator - Software Bug 16 lines
5.171Thu Mar 14 1996 22:43 Robot bottom position @ L Send/ Robot Load Pos Changed 28 lines
5.175Sat Mar 16 1996 22:37 Robot Vac Problems / Load Station Drop-Off Positions 25 lines
5.183Thu Mar 21 1996 22:25 Wafer Fly-Out & Breakage @ 7:10 p.m. 11 lines
5.185Fri Mar 22 1996 22:42 32" Pad cut down & installed 7 lines
5.189Thu Mar 28 1996 22:43 Strasbaugh Cleaning Station Brush Height Adjustment 9 lines
5.214Thu Jun 06 1996 23:22 Pad & Conditioning Disk Changed 5 lines
5.220Sat Jun 29 1996 22:57 Squeaking Noise In Bridge 10 lines
5.226Sat Jul 13 1996 23:48 Large scratches on wafers / conditioning disks suspected 10 lines
5.288Fri Nov 15 1996 22:17 Wafer Breakage / Left Hub o-rings Shredded 17 lines
5.289Sat Nov 16 1996 22:15 Wafer Breakage 11 lines
5.295Sat Dec 07 1996 22:47 Amperage spikes during downforce ramp / Wafer fly outs 26 lines
5.303Sat Dec 14 1996 22:25 Broken Wafers - Pads Suspect 14 lines
5.316Fri Dec 27 1996 22:34 Robot Errors / Robot top Arm Sensor Cleaned 16 lines
5.318Sat Dec 28 1996 22:20 Robot Z Axis Failures / Encoder Cable Replacement 44 lines
5.322Thu Jan 02 1997 22:31 Computer Replaced / video control boxes NG 16 lines
5.324Fri Jan 03 1997 22:37 Video Controller Box Back Ordered / Temporary Set up in Place. 11 lines
5.329Fri Jan 10 1997 21:58 Vacumm leaks at the hubs / o-rings replaced 22 lines
5.336Sat Feb 08 1997 22:24 Left Spindle Rotory Union Leaking Vacuum. 27 lines
5.341Fri Feb 14 1997 22:25 Tool EMO'ing Itself / Table RPM Low Errors 25 lines
5.345Sat Feb 22 1997 22:37 Faulty Door Interlock Switch / Robot Rotation Homing Failure 26 lines
5.350Sat Mar 01 1997 22:04 Dorr Latches Need Replacement 11 lines
5.352Sat Mar 08 1997 20:04 Carriers Sticking To Pad 35 lines
5.353Sat Mar 15 1997 13:48 Conditioner Head Rotation Failures 38 lines
5.356Fri Mar 21 1997 22:40 Right Carrier Fell Off Hub / New Fairchild Vac Regulator 19 lines
5.358Sat Mar 22 1997 22:32 Left Spindle Dropping Carrier 23 lines
5.364Wed Apr 02 1997 23:28 Load Stations Adjusted 9 lines
TOPIC 6.0 CMP.A1 PM CHECKSHEETS
6.13Sat Jan 06 1996 19:59 CMP.A1 - WW27 - WEEKLY PM CHECKSHEET 92 lines
6.83Wed Mar 05 1997 21:47 WW36 WEEKLY PM CHECKSHEET 78 lines
TOPIC 7.0 CMP.A2 EE/PE PASSDOWNS
7.91Fri Nov 10 1995 22:51 Wafer Fly-Out Experiment 9 lines
7.94Sat Nov 18 1995 22:27 CMP.A2 Status - 11/18/95 9 lines
7.101Fri Nov 24 1995 22:40 Conditioner Arm Actuator "Rod End" Replaced 13 lines
7.109Wed Dec 13 1995 22:16 Wafer Breakage 7 lines
7.112Sat Dec 30 1995 18:39 Shuttle Adjustments / Air Motor Performance 27 lines
7.127Thu Feb 08 1996 23:29 Strasbaugh Robot Upgrade 9 lines
7.130Fri Feb 09 1996 22:27 Robot Upgrade completed 5 lines
7.131Sat Feb 10 1996 22:46 Robot Vacuum Sensor needs recalibration 10 lines
7.135Thu Feb 15 1996 22:27 Slurry Pump hoses replaced 6 lines
7.159Fri Mar 22 1996 22:39 Wafer Fly-Outs - Cut Down Speedfam 32" IC1000 Pads 21 lines
7.188Fri May 24 1996 23:25 Slurry on Pad during Wet Idle Mode 10 lines
7.194Sat Jun 08 1996 13:19 Robot Cable Replaced / Cable not the same. 16 lines
7.196Wed Jun 12 1996 23:38 Particles - Cal Var #158 changed from 0 to 1 12 lines
7.213Sat Aug 24 1996 19:53 Dropping Wafers At Lift Off / Right Hub O-Ring Replaced 10 lines
7.215Fri Sep 06 1996 22:53 Left Spindle Vacuum Errors 8 lines
7.259Fri Oct 25 1996 23:14 Wafer Crash - No Slurry Flowing 10 lines
7.264Fri Nov 01 1996 22:31 Robot Vac Switch / Left Spindle Vac Error / D.I.- SLurry Valves 30 lines
7.268Sat Nov 09 1996 22:08 Left & Right Spindle Rotory Unions Replaced 25 lines
7.273Thu Nov 14 1996 22:28 Polish Tub Water Level Alarms. 11 lines
7.275Fri Nov 15 1996 22:27 Polish Tub Level Errors / Remote Vacuum Pump 18 lines
7.276Sat Nov 16 1996 22:23 Pad Replacement Due To Poor Uniformity 10 lines
7.278Thu Nov 21 1996 22:37 Wafer Detected On Robot Errors 9 lines
7.289Fri Dec 13 1996 22:23 Right Spindle Hub (GAP) Adjusted. 10 lines
7.290Sat Dec 14 1996 22:35 Broken Wafers / Wafers Sticking To Pad - Suspect Pads 25 lines
7.296Fri Dec 27 1996 22:25 Robot errors / ruptured tubing. 15 lines
7.302Sat Jan 18 1997 22:07 Wafer Breakage / 2 Product Wafers Scrapped 45 lines
7.306Wed Jan 22 1997 22:27 "Wafer Not Found On Robot " - Errors 10 lines
7.316Sat Feb 01 1997 22:16 Robot & Left Spindle Vacuum Failures 35 lines
7.328Thu Feb 13 1997 22:33 Gearbox Replaced 23 lines
7.330Fri Feb 14 1997 22:35 Can't get the Bridge to Table sweep alignment in. 18 lines
7.332Sat Feb 15 1997 22:41 Gearbox install update 32 lines
7.338Wed Feb 19 1997 22:33 Gearbox Update / Mounting Screws Turned Down 18 lines
7.349Thu Apr 03 1997 22:19 4" COnditioning Disk Experiment Ongoing. 15 lines
7.355Fri Apr 11 1997 23:25 System leaving wafers on pad at lift off. 9 lines
7.375Fri May 09 1997 23:33 Scratches on Wafers / Cleaning Station Air Motors 8 lines
TOPIC 8.0 CMP.A2 PM CHECKSHEETS
8.40Fri Jun 14 1996 20:38 WW50 ANNNUAL P.M. 202 lines
8.90Thu Apr 17 1997 16:18 WW42 Weekly PM Checksheet 81 lines
TOPIC 15.0 STRASBAUGH GENERAL ISSUES
15.9Wed Jan 22 1997 22:23 Gimbal Bearings Replaced - #3 & #11 6 lines
15.11Sat Apr 12 1997 23:46 Bad Pads Removed From Room 9 lines
TOPIC 17.0 CMP.B1 EE/PE PASSDOWNS
17.92Fri Nov 17 1995 22:23 Slurry pump hose/wafer breakage - COnd gimbal assem 19 lines
17.94Sat Nov 18 1995 22:02 Wafer Breakage Recovery / System Status 23 lines
17.107Fri Dec 01 1995 22:31 Load Cup height adjustment 20 lines
17.117Thu Dec 07 1995 22:17 Vacuum Tank Popet Valve rebuilt / Head #4 Wafer Loss Sensor 45 lines
17.125Sat Dec 16 1995 22:20 R Recieve Elev Dump Valve / Vac Tank Poppet Valve 19 lines
17.130Fri Dec 22 1995 20:26 Scratches 11 lines
17.137Thu Jan 04 1996 21:54 Infranor's rewired / Scrubber Rebuilt 18 lines
17.150Thu Jan 11 1996 22:14 Particle Problems / Slurry Filter Changed 10 lines
17.188Thu Feb 08 1996 23:36 High Particles 13 lines
17.189Thu Feb 08 1996 23:46 Carrier #1 Rotation Motor will be replaced. 13 lines
17.192Fri Feb 09 1996 22:32 Head #1 rotation failures / new cables on the way. 8 lines
17.203Sat Feb 24 1996 22:24 Inverter Timeout Error-Table RPM / Head #4 Rotation Errors. 16 lines
17.210Fri Mar 01 1996 22:27 Spindle Rotation Error on Heads #4 & #5 7 lines
17.230Thu Mar 21 1996 23:26 Head #4 Cable Upgrade / Load Cassette Mapper Controller 15 lines
17.231Fri Mar 22 1996 22:26 Load Cassette Mapper Controller Replaced. 9 lines
17.253Fri May 24 1996 23:10 Head Rotation Errors / Infranor MC Adjustments Made. 13 lines
17.256Wed May 29 1996 23:34 Robot Controller Replaced / Head #2 Rotation Errors 13 lines
17.259Thu May 30 1996 23:37 Head #1 Rotation Cable Is Bad 7 lines
17.269Thu Jun 06 1996 23:19 Rotation Errors / CDATA.CMP File Changed 23 lines
17.272Wed Jun 12 1996 23:29 Head #1 Rotation Error - Experimental Pad On Table 11 lines
17.279Sat Jun 29 1996 23:29 Carrier to CUp Alignment Problems/Table Drains/Rust on Table 30 lines
17.294Sat Jul 13 1996 23:44 Invertor Communication Errors / IO_ILD3 recipe corrupted 38 lines
17.305Sat Aug 03 1996 23:35 High Particles Continue / Pads and/or Slurry suspected 52 lines
17.326Fri Aug 16 1996 23:48 Load Flipper Problems 52 lines
17.328Sat Aug 17 1996 23:40 Elevator Dump Valve Sticking / DI Water Leak In Fluids Cabinet 19 lines
17.336Wed Aug 21 1996 23:40 Head #1 Rotation Motor On Order / Elevator #1 Dump Valve Sticking 19 lines
17.338Thu Aug 22 1996 23:39 Hard Drive Problems / Head #1 Rotation Failure 15 lines
17.340Fri Aug 23 1996 23:14 Hard Drive Replaced / Elev #1 Dump Valve Replaced / Head #1 Rotation Probs 20 lines
17.342Sat Aug 24 1996 19:48 Head #1 Rotation Error Problem - Update. 40 lines
17.348Thu Aug 29 1996 23:12 Head #2 Rotation Errors / Dump Valve Leak 15 lines
17.349Sat Aug 31 1996 23:24 Head #1 Rotation Error During Segment #3. 14 lines
17.352Wed Sep 04 1996 23:36 Tank #2 Dump valve 10 lines
17.353Fri Sep 06 1996 22:50 Robot Deservoed Itself Twice 8 lines
17.383Thu Sep 26 1996 23:21 Head #1 Rotation Errors 9 lines
17.417Fri Oct 18 1996 23:15 Head #1 Load Cell Calibration Activity. 10 lines
17.428Fri Oct 25 1996 23:09 Rotation Motor Changed / High Particles 26 lines
17.447Sat Nov 02 1996 22:36 Software Locking UP During Wafer Loading Sequence 21 lines
17.455Thu Nov 14 1996 22:23 High Particles / Broken Scrubber Drive Belt 22 lines
17.457Sat Nov 16 1996 22:27 High Particles / Tool Cleaned & Pad Replaced 13 lines
17.465Thu Nov 21 1996 22:28 System Paused in Seg #1 / Broken Wafers. 9 lines
17.482Sat Dec 14 1996 22:47 Inverter Comm Errors - Suspect Wafer Loss Board 22 lines
17.494Fri Dec 27 1996 17:59 Head to Head Removal Rate & Uniformity Problems 48 lines
17.495Fri Dec 27 1996 22:42 Head to Head Removal Rates Still Out Of Spec 29 lines
17.498Thu Jan 02 1997 22:36 High Particles / Cleaned up ok 13 lines
17.506Thu Jan 09 1997 22:10 Particle Problem / Slurry System Flushed & Filter Changed 19 lines
17.508Thu Jan 16 1997 22:07 Conditioner Wheel Replaced 15 lines
17.510Wed Jan 22 1997 22:38 Broken Wafers In Unload Elevator Tank 11 lines
17.513Thu Jan 30 1997 22:11 Unload Lift Cylinder Sensor Replaced / Cup #2 Sleeve Honed 24 lines
17.523Fri Feb 21 1997 22:48 Replaced Slurry Pump #2 Motor/ Calibrated Down Force 15 lines
17.533Sat Mar 22 1997 22:37 Carrier Rotation Failure 10 lines
17.539Fri Mar 28 1997 22:32 Rotation Errors 18 lines
17.541Thu Apr 03 1997 23:22 Carrier to Cup ALign/ Down Force Cal / Infranor Replacement 46 lines
17.553Sat Apr 19 1997 23:30 Decontamination Punch List - Update 22 lines
TOPIC 18.0 CMP.B1 PM CHECKSHEETS
18.15Wed Jan 10 1996 20:38 WW28 Monthly PM Checksheet 28 lines
18.20Sat Feb 03 1996 20:02 (WW31) Monthly P.M. 29 lines
18.34Sat May 11 1996 21:10 Weekly PM Checksheet - WW45 79 lines
18.50Fri Aug 02 1996 23:10 CMP.B1 Monthly P.M. Checksheet for WW5. 146 lines
18.57Fri Sep 06 1996 23:12 WW10 Monthly P.M. Check Sheet 146 lines
18.60Fri Sep 27 1996 23:21 WW13 WEEKLY PM CHECKSHEET 87 lines
18.84Thu Feb 27 1997 20:17 WW35 Weekly PM Check Sheet 103 lines
18.85Fri Mar 07 1997 01:08 WW36 Monthly PM CheckSheet 190 lines
18.90Fri Apr 11 1997 19:02 WW41 WEEKLY PM CHECK SHEET 102 lines
TOPIC 19.0 CMP.B2 EE/PE PASSDOWNS
19.5Thu Nov 09 1995 23:08 Mechanical Acceptance Activity Update 9 lines
19.7Fri Nov 10 1995 22:59 Mechanical Acceptance Update 11 lines
19.16Thu Nov 30 1995 22:33 Unload Cup Pedistal replaced / Load cup #3 sensor error 16 lines
19.18Fri Dec 01 1995 22:39 Unload air cylinder extension rod replaced. / Bent 6 lines
19.22Thu Dec 07 1995 22:33 Collision between spindle #3 and load cup #3 / Major Damage 24 lines
19.24Fri Dec 08 1995 22:29 Index Table Replacement 9 lines
19.25Sat Dec 09 1995 21:51 Index Table Replacement/Load Cup Sticking Prob Action Plan 14 lines
19.30Wed Dec 13 1995 22:20 Load Cup #3 misload/Springs replaced 6 lines
19.37Fri Dec 22 1995 20:14 Load Flipper Mis-Load / SV #65 Sticking Open. 17 lines
19.52Thu Jan 11 1996 22:21 Vacuum System Upgrade 8 lines
19.91Sat Feb 10 1996 22:52 Transfer Paddle Interference problem 8 lines
19.98Thu Feb 15 1996 22:35 2nd Table Process released to Manufacuring 6 lines
19.102Sat Feb 17 1996 22:31 Wafer Breakage / Speedfam Rep on the way. 21 lines
19.111Wed Feb 21 1996 22:27 Index Table Load CUps / Flipper Box 39 lines
19.114Sat Feb 24 1996 22:08 Conditioner Sensor Adj. / Scrubber Down Sensor adj. 14 lines
19.128Thu Mar 21 1996 23:32 Unload Track #2 double slotting wafers. 9 lines
19.143Sat Apr 13 1996 23:24 Fatal Error 11 lines
19.161Sat May 11 1996 23:47 VAC PROBLEMS/CRASH ON SECONDARY TABLE 30 lines
19.172Wed May 29 1996 23:39 Particles/Head #4 Flyout/Special Primary Pad On Tool 17 lines
19.181Sat Jun 08 1996 12:41 2 lines
19.182Sat Jun 08 1996 13:04 Unload Flipper Sensor Error / Water In The Box. 20 lines
19.186Wed Jun 12 1996 23:22 Remote Touchscreen Back In Service 7 lines
19.188Fri Jun 14 1996 00:07 Main Vac Too Low Error / Leadscrew Covers Loose 20 lines
19.218Sat Aug 17 1996 23:46 MONTHLY PM PARTIALLY COMPLETED & DEFERRED TO WW8. 13 lines
19.220Thu Aug 22 1996 23:45 Head #5 Fly -outs / Vacuum not present at touch down 11 lines
19.223Sat Aug 24 1996 19:57 Wafer Misload on Head #3. 9 lines
19.228Fri Aug 30 1996 23:29 CB #6 Replaced/Index Table Infranor Replaced/ Elevator #1 Drain Tube Loose 45 lines
19.261Sat Nov 09 1996 21:47 Wafer Loss Detection Board Replacement 11 lines
19.266Fri Nov 15 1996 22:38 Head #5 Carrier to Cup Alignment Drift Problem 20 lines
19.267Sat Nov 16 1996 23:00 Head #5 Oscillation Drift / Action Plan 47 lines
19.279Thu Dec 26 1996 22:26 Misload on head #5. - Rebooted System 13 lines
19.287Fri Jan 03 1997 22:28 Wafer Breakage / Action Plan For Today 58 lines
19.300Thu Jan 16 1997 21:55 Conditioning Wheel Changed 9 lines
19.308Wed Feb 05 1997 22:24 Uniformity problems with head #2. 22 lines
19.326Wed Apr 02 1997 23:32 Load Flipper Timeout Error 10 lines
19.327Thu Apr 03 1997 23:25 Small D.I. Water leak under index table 8 lines
19.328Fri Apr 11 1997 23:16 Load Flipper Timeout Error 12 lines
19.339Sat Apr 19 1997 23:41 Wafer Breakage - Removal Rate on Head #1 22 lines
TOPIC 20.0 CMP.B2 PM CHECKSHEETS
20.25Sat Apr 27 1996 21:35 MONTHLY PM CHECKSHEET WW43 147 lines
20.47Sat Aug 17 1996 22:59 WW7 MONTHLY P.M. DEFERRED TO WW8 6 lines
20.66Fri Dec 13 1996 21:11 Weekly PM Check Sheet (WW24) 91 lines
20.74Fri Jan 31 1997 16:55 CMP.B2 WEEKLY CHECK SHEET (WW31) 90 lines
20.89Sat May 10 1997 22:53 ww45 weekly pm check sheet 102 lines
TOPIC 21.0 CMP.B3 EE/PE PASSDOWNS
21.11Sat May 11 1996 23:56 Marathon Run Results/Adjustments/Ready for MQC's 24 lines
21.28Fri Jun 21 1996 23:30 Slurry Delivery Trouble / Timeout Errors - Carriers at Scrub 29 lines
21.32Sat Jun 29 1996 23:01 Table Gearbox Is Leaking Again 10 lines
21.39Fri Jul 19 1996 23:52 Head #1 DF & Conditioner DF EP Regulators need Recalibration 26 lines
21.65Fri Aug 23 1996 23:17 Wafer Loss Detection Sensors Adjusted 11 lines
21.67Thu Aug 29 1996 23:27 Mapper Timeout / Scrubber Timeout Errors! 26 lines
21.68Fri Aug 30 1996 23:38 Scrubber Timeout Errors / Dampners Removed 13 lines
21.69Sat Aug 31 1996 23:31 Load Flipper Failing To Pick Up At Pre Aligner 9 lines
21.71Thu Sep 05 1996 23:22 Inverter Communication Errors 9 lines
21.83Thu Sep 26 1996 22:42 Pre Aligner Sensor Failure / Tin Split Lot 10 lines
21.85Sat Sep 28 1996 23:25 Carrier Rinse For Head #2 Failed to Turn Off. 12 lines
21.94Fri Oct 18 1996 23:28 Mapper Errors - Please Document All Failures 12 lines
21.139Thu Dec 26 1996 22:19 EP Regulators, Down Force Calibrated due to Removal & Uniformity 28 lines
21.143Sat Dec 28 1996 22:39 Head to Head Removal rate probs / Pads suspect 31 lines
21.149Thu Jan 09 1997 22:22 Moisture Sensor Alarm / Looking For Cause 7 lines
21.155Sat Jan 25 1997 13:51 System Pausing During Load / Scrubber Time out 39 lines
21.157Thu Jan 30 1997 22:17 Software Utility Progran Run/No Corrupted Files 7 lines
21.168Thu Mar 13 1997 20:20 Wafer Breakage / Root Cause Unknown 44 lines
21.170Sat Mar 15 1997 13:20 Wafer Loss Detection Board Replaced. 16 lines
21.188Fri Apr 11 1997 23:21 SLurry Detect Error 15 lines
21.221Sun Jun 01 1997 00:17 Mapper Problems 42 lines
TOPIC 22.0 CMP.B3 PM CHECKSHEETS
22.20Fri Sep 27 1996 21:41 WW13 Weekly PM 86 lines
22.22Thu Oct 03 1996 19:37 WW14 Weekly P.M. Check Sheet 88 lines
22.27Wed Nov 13 1996 21:30 WW20 MONTHLY PM CHECKSHEET 171 lines
22.39Fri Jan 31 1997 16:56 CMP.B3 WEEKLY CHECK SHEET (WW31) 90 lines
22.40Thu Feb 06 1997 18:19 WW32 WEEKLY PM CHECKSHEET 102 lines
22.41Sat Feb 15 1997 16:16 WW33 Monthly PM CheckSheet 184 lines
22.42Thu Feb 20 1997 22:08 WW34 WEEKLY PM CHECKSHEET 101 lines
22.43Fri Feb 28 1997 13:04 WW35 Weekly PM Check Sheet 102 lines
TOPIC 23.0 CMP.B4 EE/PE PASSDOWNS
23.48Sat Apr 12 1997 23:43 Mapper Errors / Wafer Breakage 66 lines
23.58Sat Apr 19 1997 23:50 Tool now running on 12% slurry from drum. 24 lines
23.76Thu May 08 1997 23:21 Wafer loss sensor adjusted (head #5) 8 lines
23.79Fri May 09 1997 23:29 Unload flipper box sealed & adjusted / Srubber station leak / high particles 38 lines
TOPIC 31.0 SPEEDFAM GENERAL ISSUES
31.16Sat Mar 01 1997 22:07 New Storage Box For Alignment Fixtures 7 lines
TOPIC 32.0 CMP.B WAFER CRASH FORM
32.6Wed Oct 02 1996 21:21 CMP.B1 Crash on 10/2/96 33 lines
TOPIC 35.0 FRACUS
35.1Sat Apr 13 1996 23:21 CMP.B2 fatal error on 4/13/96. 8 lines
TOPIC 41.0 CMP.D1 EQUIP PASSDOWNS
41.44Fri May 23 1997 21:18 Memorial Day Shutdown Checksheet 51 lines
TOPIC 45.0 CMP-SCRUB.A1 EE/PE PASSDOWNS
45.62Fri Dec 15 1995 22:34 Scrubber NH4oH OCP's Jumped-out 16 lines
45.90Fri Mar 29 1996 22:21 "Inside Brush Station" Shaft/Arm Assy Replaced 8 lines
45.109Fri May 24 1996 23:20 Spin Station Slide Assembly Air Cyl Replaced 10 lines
45.113Thu May 30 1996 23:41 Outside Brush Station Motor & Bearings Replaced 11 lines
45.136Thu Sep 19 1996 23:32 IS Brush Station Roller Arm / Transport Belt Slipping 10 lines
45.150Fri Oct 18 1996 23:22 Timeout Errors - Outside Brush Station 13 lines
45.153Sat Nov 02 1996 22:23 Recieve Station Lifter Did Not Rise 11 lines
45.154Thu Nov 07 1996 22:38 Semi Annual Incomplete Checksheet Posted. 5 lines
45.165Fri Jan 10 1997 22:17 Low Ammonia Alarms / Shut Off Valve Stripped 25 lines
45.177Thu Apr 10 1997 23:28 Robot Dropped Wafer / Lifter Did Not Rise Up 11 lines
TOPIC 46.0 CMP-SCRUB.A1 PM CHECKSHEETS
46.64Fri Nov 08 1996 21:34 ww19 Semi Annual PM 109 lines
TOPIC 47.0 CMP-SCRUB.A2 EE/PE PASSDOWNS
47.63Fri Dec 22 1995 20:55 Send Elevator Sensor Adjustment / Timeout Errors 13 lines
47.82Fri Mar 01 1996 22:31 Spin Station - Wafers Double Stacked & Broken 6 lines
47.101Wed May 29 1996 23:30 Roller Bearing Assembly Ordered 5 lines
47.102Thu May 30 1996 23:45 Send Station Sensor Temporarally Readjusted 7 lines
47.115Wed Sep 04 1996 23:46 SPin Station Motor COntroller 9 lines
47.117Thu Sep 05 1996 23:25 High Particles 9 lines
47.129Thu Nov 21 1996 22:32 Glass Bearings Replaced On the Outside Brush Station. 10 lines
47.134Sat Jan 18 1997 22:34 Recieve Station Lifter Failed To Rise to the top Position 27 lines
47.138Wed Jan 22 1997 22:33 Software Upgrade - Unsucessful 11 lines
47.149Thu Apr 10 1997 23:32 Robot Stopped At Spin Station / Tool Locked Up. 10 lines
TOPIC 49.0 CMP-SCRUB.A3 EE/PE PASSDOWNS
49.13Fri Aug 23 1996 23:23 Inside Brush Station Roller Arm Cracked 12 lines
49.17Thu Sep 05 1996 23:31 Robot Dropping Wafers At Spin Station 13 lines
49.19Fri Sep 06 1996 22:59 Dropping Wafers At Recieve Station Lifter. 10 lines
49.84Sat May 24 1997 23:33 Robot drop off problems at Lifter 28 lines
TOPIC 54.0 CMP-SCRUB.C1 EE/PE PASSDOWNS
54.3Sat Sep 28 1996 23:17 Shaft Height Adg / Having Difficulty Removing Pad 9 lines
54.5Thu Jan 16 1997 22:10 Brushes Replaced 7 lines
TOPIC 55.0 CMP-SCRUB.C1 PM CHECKSHEETS
55.2Sat Aug 31 1996 20:44 WW9 WEEKLY PM CHECKSHEET 31 lines
TOPIC 61.0 GENERAL CMP ISSUES
61.6Fri Nov 10 1995 23:04 Table Stpping Problem after polish. /Step #6 value incorrect 9 lines
61.7Thu Nov 30 1995 22:40 Reworked Speedfam Carrier Rings 11 lines
61.8Sat Dec 16 1995 22:05 CMP Carrier Status 26 lines
61.9Thu Dec 21 1995 22:32 Cmp.b2 index table 7 lines
61.10Fri Dec 22 1995 20:00 OnTrak OCP's repaired and back on-line. / Jumpers removed. 12 lines
61.13Sat Dec 30 1995 18:51 CMP Start-up Activities / High Putrity D.I. Down 18 lines
61.15Thu Jan 04 1996 22:00 Speedfam Carrier Plates 6 lines
61.16Sat Jan 06 1996 22:36 Speedfam Carrier Plates 9 lines
61.22Sat Feb 17 1996 22:40 SLurry system failure / send carrier plates to speedfam 25 lines
61.23Sat Feb 17 1996 23:06 Ammonium hydroxide down, Slurry System down. 8 lines
61.25Sat Feb 24 1996 22:32 28" Rodel IC-1000 Pads performing Poorly 12 lines
61.29Sat Mar 09 1996 22:41 Solvent Sink Faucet leak / CMP.A! TCU Temp / Please CLean Carriers 25 lines
61.31Thu Mar 21 1996 23:17 Strasbaugh BackPressure Recipe Changes 17 lines
61.33Thu Mar 28 1996 22:45 10 Speedfam Plates returned for Film Conturing 5 lines
61.34Sat Apr 13 1996 23:33 High Purity D.I. Water Pipe Break 11 lines
61.48Sat Aug 31 1996 23:34 WW9 Semi Annual P.M. for B2 Partially Completed 7 lines
61.49Fri Sep 06 1996 23:02 Slurry Delivery System Failure 9 lines
61.53Thu Sep 26 1996 23:08 Particle Problems 42 lines
61.62Fri Oct 25 1996 23:25 House Slurry System Failed - No Alarms Were Activated 12 lines
61.66Fri Nov 01 1996 22:38 House Slurry System Purge Complete 13 lines
61.67Sat Nov 02 1996 22:44 Low Removal Rates On Speedfams - Pads Suspected 15 lines
TOPIC 77.0 IN-COMPLETE PMs
77.1Thu Apr 17 1997 23:35 WW42 MONTHLY PM CHECKSHEET 188 lines
77.3Sat May 24 1997 23:41 ww47 partial checksheet for CMP_SCRUB.A3 46 lines
TOPIC 86.0 OLD PM SCHEDULE
86.1Tue Nov 28 1995 18:35 FY96 CMP PM SCHEDULE 166 lines

Additional information

First Post:Wed Apr 06 1994
Last Post:Sun Jun 01 1997
# Topics:1
# Replies:278
# We have note bodies for:277
Total memory used by this script: 1,125,976 (4,194,304)